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集成微纳系统研究所简介

    北京大学微电子学研究院集成微纳系统研究所成立于1996年,多年来在王阳元院士的指导下,致力于微纳加工技术、微纳米器件和集成微纳系统研究。本研究所是“微米/纳米加工技术国家级重点实验室”的重要组成部分。重点开展微纳技术的基础研究和应用基础研究,研究方向包括:
    微纳加工技术
    微纳传感器与执行器
    微纳系统集成技术
    本研究所现有研究人员14人,其中教授7人,教授级高工2人,副教授5人。是一个以中青年科研人员为骨干的创新性研究团队。研究人员中 80%以上具有在国外长期从事研究工作的经历。此外,研究所还从国内外聘请了十几名客座教授和研究人员。
    近5年来,集成微纳系统研究所承担国家科技重大专项、国家973计划、国家863计划、国家自然科学基金、重点实验室建设、地方和部委科研项目、以及国际国内合作等各类研究项目150余项,在硅基MEMS关键加工技术和成套工艺、先进MEMS材料加工工艺、MEMS设计方法学、工艺建模与仿真、MEMS/IC单片集成技术、纳机械加工技术、惯性MEMS器件及系统、射频MEMS器件及系统、光学MEMS器件及系统和生物MEMS器件及系统等方面取得了高水平的研究成果。
    在积极开展研究工作的同时,本研究所十分重视人才的培养,近5年已培养博士、硕士研究生64人,出站博士后10人。目前在读博士和硕士生71人,在站博士后7人,研究所每年都选派优秀的学生到国外大学、研究院所进修交流、参加学术会议或工作。针对微纳技术研究多学科交叉的特点,除微电子专业的学生外,集成微纳系统研究所还广泛吸纳电子、机械、物理、生物、力学等专业的学生与博士后人员,并将逐步扩大研究生培养计划。
    集成微纳系统研究所也一直致力于促进技术和研究成果的产业化。以实验室和研究所开发的技术为基础,成立了我国第一个MEMS制造企业—青鸟元芯微系统科技有限公司,以及无锡集成微纳系统工程技术研究中心,建立了科技成果向产业化转化的有效机制。

 

MEMS Research Center Introduction

The MEMS Research Center, Institute of Microelectronics, Peking University, has been established in 1996. The MEMS Research Center, as a part of “The National Key Laboratory of Science and Technology on Micro/Nano Fabrication”, devotes the fundamental and applied researches on silicon-based micro/nano fabrication, micro/nano sensors and actuators, and micro/nano integrated systems.

The Center consists of 14 faculty members, including 9 full professors and 5 associate professors. The Center is an innovative research group, in which more than 80% of the faculty have overseas research experience. Beside, some domestic and foreign professors and researchers are appointed by the Center.

During the past 5 years, the Center received more than 150 significant supports from Important National Science & Technology Program, 863, 973, NSFC, laboratory program and many other sources. The Center facilitates researches on microfabrication technologies, micromachined devices, microsystem design and burgeoning NEMS technologies. Three MEMS processing modules have been developed and standardized. Moreover the Center promotes fundamental MEMS researches including design methodology, modeling and simulation of processes, monolithic integration of MEMS and IC, nanofabrication, and novel MEMS devices.

Sixty four Ph.D. and master students graduated and 10 postdoctors finished their postdoctoral careers in the Center during the past 5 years. Every year about 30 graduate students (6-8 Ph.D. students) and 3-5 postdoctoral researchers enroll in the Center .The MEMS Research Center has collaborative projects with many research and industrial partners within and outside the country. Every year, internationally recognized experts visit the Center to give seminars; at the same time, faculty and students in the Center go aboard to attend international meetings and conduct research. 

The Center also endeavors to industrialize its research. First MEMS Co., Ltd., which was spun off from the Center, is the first company to apply MEMS technology to produce pressure sensors by batch production in mainland China. The Center also collaborates with other domestic and international companies to commercialize its developed technologies and devices.


Phone: 86-10-62752536 Fax: 86-10-62751789
The Microelectromechanical System (MEMS) Research Center
Department of Microelectronics, Peking University
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