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李志宏

Journal Papers

1.       Renxin Wang, Xianju Huang, Guangfeng Liu, Wei Wang, Fangtian Dong and Zhihong Li*, Fabrication and Characterization of a Parylene-based 3D Microelectrode Array for Use in Neural Prosthesis, Journal Of Microelectromechanical Systems, Accepted.

2.       ZhaoXin GENG, Qing LI, Wei WANG, Zhihong LI*, PDMS prism-glass optical coupling for surface plasmon resonance sensors based on MEMS technology, Sci China Ser F, Accepted

3.       Xu Ji, Huaiqiang Yu, Xianju Huang, Yinghua Lei, Zhihong Li*, Parylene film for sidewall passivation in SCREAM process,  Sci China Ser E-Tech Sci, Feb. 2009, vol. 52, no. 2, 357-362

4.       Zhen Chen, Yu Zhao, Wei Wang*, and Zhihong Li, Microfluidic patterning of nanoparticle monolayers, Microfluidics and Nanofluidics, 2009, 7:585-591.

5.       Zhen Chen, Yunshan Wang, Wei Wang*, and Zhihong Li, Nanofluidic electrokinetics in nanoparticle crystal, Applied Physics Letters, 2009, 95:102105

6.       Yinhua Lei, Wei Wang*, Huaiqiang Yu, Yingcun Luo, Ting Li, Yufeng Jin, Haixia Zhang and Zhihong Li, A parylene-filled-trench technique for thermal isolation in silicon-based microdevices, J. Micromechanics and Microengineering, 2009, 19: 035013.

7.       Xi Ji, Lu Wang, Jianzhong Xi, Zhihong Li,* A piezoresistive cantilever for lateral force detection fabricated by a monolithic post-CMOS process, J. Micromech. Microeng. 18 (2008) 115001 (11pp) (SCI)

8.       Siwei Zhao, Wei Wang, Zhihong Li*, Linearity and dissociative antigen noise analyses of competitive microfluidic heterogeneous immunoadsorption, Biomed Microdevices (2008) 10: 519–529

9.       Wei Wang, Yu Zhao, Yinhua Lei, Zhihong Li*, Nanoparticle-based lift-off technique ultra-thin nanoporous film preparation, Science in China Series F: Information Sciences, Jun. 2008, vol. 51, no. 6, 819-824

10.   Wei Wang, Zhihong Li*, Simplified Scaling Transformation for the Numerical Simulation of MEMS Devices With Thin Film Structures, Chinese Journal Of Mechanical Engineering, Vol. 21, No. 5, 2008

11.   Haixia Zhang, Hui Guo, Zhe Chen, Guobing Zhang, and Zhihong Li*, Application of PECVD SiC in Glass Micromachining, Journal of Micromechanics and Microengineering, (2007)17 775-780

12.   Haixia Zhang, Hui Guo, Yu Wang, Guobing Zhang, and Zhihong Li*, Study on PECVD SiC coated Pressure Sensor, Journal of Micromechanics and Microengineering, (2007)17 426-431 

13.   Yu Jie Tang, Jing Chen, Yubo Huang, Dachao Li, Sha Sha Wang, Zhihong Li, Wendong Zhang, Ultra-sensitive highly reproducible film stress characterization using flexible suspended thin silicon plates and local curvature measurements, Journal of Micromechanics and Microengineering, v17, n10, p1923-1930, 2007

14.   Wendian Shi, Norman C. Tien, and Zhihong Li*, A Highly Reliable Lateral MEMS Switch Utilizing Undoped Polysilicon as Isolation Material, Journal Of Microelectromechanical Systems, VOL. 16, NO. 5, 2007, PP 1173-1184

15.   Yin Zhang, Yisong Wang, Zhihong Li*, Yubo Huang, and Dachao Li, Snap-Through and Pull-In Instabilities of an Arch-Shaped Beam Under an Electrostatic Loading, Journal Of Microelectromechanical Systems, VOL. 16, NO. 3, 2007, PP684-693

16.   Xiang Han, Wengang Wu, Yi Li, Zhihong Li, Yilong Hao, Guizhen Yan, “Electroless copper plating applicable for bulk-silicon micromachined radio frequency inductor”, Thin Solid Films 515 (2006) 2607–2611. (SCI)

17.   Yiyong Tan, Rongchun Zhou, Haixia Zhang*, Guizhang Lu, Zhihong Li, “Modeling and Simulation of LAG Effect in Deep Reactive Ion Etching Process”, Journal of Micromechanics and Microengineering, 16  (2006)  2570-2575 (SCI)

18.   Wendian Shi, Haixia Zhang*, Guobing Zhang and Zhihong Li , “Modifying residual stress and stress gradient in LPCVD Si3N4 film with ion implantation”, Sensors and Actuators A: Physical , 130–131 (2006) 352–357 (SCI)

19.   Wengang Wu*, Li Yi, Fengyi Huang, Xiang Han, Shaoyong Zhang, Zhihong Li and Yilong Hao, MEMS Inductor Consisting of Suspended Thick Crystalline Silicon Spiral with Copper Surface Coating, Chinese Journal of Semiconductors, vol.27 No.4,2006, pp662

20.   Wengang Wu*, Fengyi Huang, Yi Li, Shaoyong Zhang, Xiang Han, Zhihong Li, Yilong Hao, and Yangyuan Wang, RF Inductors with Suspended and Copper Coated Thick Crystalline Silicon Spirals for Monolithic MEMS LC Circuits, IEEE Microwave and Wireless Components Letters 15, No.12, pp.853-855, Dec. 2005.

21.   Yong Zhu, Guizhen Yan*, Jie Fan, Jian Zhou, Xuesong Liu, Zhihong Li and Yangyuan Wang, “ultra deep and high aspect ratio electrical isolation trench” Journal of Micromechanics and Microengineering, 2005, V. 15, No 3, pp 636-642 (SCI)

22.   Ye Wang, Zhihong. Li, Daniel McCormick1 and Norman Tien*, A low-voltage lateral MEMS switch with high RF performance, J. Microelectromechanical Systems. 2004, Vol. 13, No. 6, P902-911

23.   Ye Wang, Zhihong Li, Daniel T. McCormick and Norman C. Tien*, A micromachined RF microrelay with electrothermal actuation, Sensors and Actuators A: Physical, Volume 103, Issues 1-2, 15 2003, Pages 231-236

24.   Zhihong Li*, Yilong Hao, Dacheng Zhang, Ting Li, Guoying Wu, An SOI-MEMS technology using substrate layer and bonded glass as wafer-level package Sensors and Actuators A-Physical 96 (1): 34-42, 2002

25.   Zhihong Li*, Guobing Zhang, Wei Wang, Yilong Hao, Ting Li, Guoying Wu, Study on the application of silicide in surface micromachining, Journal of Micromechanics and Microengineering 12 (2): 162-167, 2002

26.   Zhenchuan Yang, Zhihong Li, Zhiyong Xiao, Yilong Hao, Guoying Wu, Numerical simulation of a bulk micromachined relay with lateral contact International Journal Of Nonlinear Sciences And Numerical Simulation 3 (3-4): 357-360, 2002

27.   Hongrui Jiang, Keytea Yoo, J. Yeh, Zhihong Li, Norman C. Tien*, Fabrication of thick silicon dioxide sacrificial and isolation blocks in a silicon substrate, Journal Of Micromechanics And Microengineering 12 (1): 87-95, 2002

28.   Dacheng Zhang, Zhihong Li*, Ting Li, and Guoying Wu, A Novel Isolation Technology in Bulk Micromachining Using DRIE and Polysilicon Refill, Journal of Micromechanics and Microengineering, 11, 2001, P13-19

29.   Gang Li, Zhihong Li, Congshun Wangg, Yilong Hao, Ting Li, Dacheng Zhang and Guoying Wu, Design and fabrication of a highly symmetrical capacitive  triaxial accelerometer, Journal of Micromechanics and Microengineering, 48–54, Vol.11, No.1, 2001.

30.   Zhihong Li* Zhixiong Xiao Yilong Hao Guoying Wu and Yangyuan WangA Bulk Micromachined Vibratory Lateral Gyroscope Fabricated with Wafer Bonding and Deep Trench Etching,  Sensors and Actuators, A83, 2000, 24-29

31.   Zhihong Li*, Dacheng Zhang, Ting Li, Wei Wang, and Guoying Wu, Bulk Micromachined Relay with Lateral Contact, Journal of Micromechanics and Microengineering , Vol. 8, No. 3, 2000

32.   Zhihong Li,* Guoying Wu, Yangyuan Wang, Zhiguo Li, and Yinghua Sun, Numerical Calculation of Electromigration under Pulse Current with Joule Heating, IEEE Tran. Electronic Devices, Vol.46, No. 1, 1999

33.   Zhihong Li*, Guoying Wu, Yangyuan Wang, Zhiguo Li, and Yinghua Sun, Dependence of Electromigration Caused by Different Mechanisms on Current Densities in VLSI Interconnects, J. Materials Science: Materials in Electronics, Vol. 10, 1999,p 653-659

34.   Zhixiong Xiao, Guoying Wu, Guobing Zhang, Zhihong Li, Yilong Hao, Wenru Chen, and Yangyuan Wang, Low Temperature Silicon Wafer-to Wafer Bonding with Nickel Silicide, J. Electrochem. Soc. Vol.145, No. 4,1998

35.   Zhixiong Xiao, Min Chen, Guoying Wu, Changde Zhao, Dacheng Zhang, Yilong Hao, Guobing Zhang and Zhihong Li, Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process, Sensors and Actuators A: Physical, Volume 77, Issue 2, 12 October 1999, Pages 113-119

36.   Zhixiong Xiao, Guoying Wu, Dacheng Zhang, Guobing Zhang, Zhihong Li, Yilong Hao, Yangyuan Wang, Silicon/Glass Wafer-to-Wafer Bonding with Ti/Ni Intermediate Bonding, Sensors and Actuators A 71(1998) 123

37.   Zhixiong Xiao Guoying Wu Yilong Hao Guobing Zhang Zhihong Li Wenru Chen Shimei Liu, Ting Liu, Tiesong Wang, Yangyuan Wang, A New Process for Releasing Micromechanical Structures in Surface Micromechining with Polysilicon support and LPCVD Si3N4 Mask” Sensors and Actuators A 72(1998) 189

38.   Zhihong Li*, Guoying Wu, and Yangyuan Wang, “Evaluation of Yield Strength in Al Interconnects in VLSI”, Chinese J. Electronics, Vol.6, 1997, P19

39.   Zhihong Li, Ye Gu, Guoying Wu, Wen-Ru Chen,Yang-Yuan Wang, “Measuring and Modeling Stresses in Al Metallization”, J. Vac. Technol. A 14(5), 1996, P2693

 

Conference Papers:

1.         Zewen Wei, Huang Huang, Zicai Liang, Zhihong Li*, A High Performance Electroporation Chip Integrating Multi-Well Plate And Annular Interdigital Microelectrodes, IEEE MEMS 2010, Accepted.

2.         Xianju Huang, Renxin Wang, Wei Wang, and Zhihong Li*, Fabrication of flexible 3D Microelectrode Array with parylene-based pattern transfer technique, Transducers’09

3.         Xu Ji, Lin Yang, Zewen Wei1, Lu Wang, Jianzhong Xi and Zhihong Li*, A MONOLITHICALLY INTEGRATED PLATFORM FOR HIGH THROUGHPUT CELL CHARACTERIZATION AND DRUG SCREENING, Transducers’09

4.         Qiang Liu, Bo Liu and Zhihong Li*, Improvement of Au cantilever fabrication process with Cu as a sacrificial layer, IEEE NEMS’09

5.         Xianju Huang, Yu Tang, Quan Qiang, Wei Wang, and Zhihong Li*, A Novel 3D Flexible Parylene-Metal Structure Fabrication Technique, IEEE NEMS’09

6.         Chenying Yang, Wei Wang*, and Zhihong Li, Optimization of corona-triggered PDMS-PDMS bonding method, Proceeding of IEEE NEMS, 2009, 319-322

7.         Zhen Chen, Yu Zhao, Wei Wang*, and Zhihong Li, Microfluidic Patterning of Nanoparticle Monolayer: Mechanism analysis and noncontinuously patterning approach Proceeding of IEEE NEMS, 2009, 818-822

8.         Fei Xie, Yunshan Wang, Wei Wang*, Zhihong Li, Gilad Yossifon and Hsueh-Chia Chang, Preparation of Rhombus-shaped Micro/Nanofluidic Channels with Dimensions Ranging from Hundred Nanometers to Several Micrometers, Proceeding of ChinaNano2009, 2009, 50-2032

9.         Zhihong Li, Flexible Three-Dimentional Microelectrode Array For Retinal Prosthesis, IEEE NANOMED’09 (Invited)

10.     Zhihong Li, Integration of SOC and LOC, IEEE NEMS’09 (Invited)

11.     X. Ji, L. Wang, J. Xi, Z. Li*, Monolithic Integration of Force Sensor, Signal-Processing Circuitry and Self-Assembled Cells for Characterization ff Muscles’ Mechanics, uTAS 2008

12.     Zhihong Li*, Xu Ji, Lu Wang, Jianzhong Xi, Merging SoC and LOC Together, International Conference on Solid-State and Integrated-Circuit Technology ICSICT’2008 October 20-23, 2008, Beijing, China (Invited)

13.     Zhaoxin Geng , Xu Ji , Xia Lou, Qing Li , Wei Wang , Zhihong Li* A surface plasmon resonanceSPRsensor chip integrating prism array based on polymer microfabrication, 9th International Conference on Solid-State and Integrated-Circuit Technology ICSICT’2008 October 20-23, 2008, Beijing, China.

14.     Zhaoxin Geng ,  Xu Ji ,  Wei Wang ,  Zhi-hong Li*, Near-infrared surface plasmon resonance (SPR) chip with silicon micro-prism and multi-micro-channel based on MEMS technology, 1st International Conference of the Chinese Society of Micro/Nano TechnologyNovember 20-22, 2008, Beijing, China.

15.     Xianju Huang Weihong Yu, Wei Wang, Chan Zhao, Chengchen Gao, Xuqian WangZhikun YangZhihong Li* and Fangtian Dong, Flexible Microelectrode Array on Parylene for Subretinal Stimulation and Its Biocompatibility Test, 1st International Conference of the Chinese Society of Micro/Nano Technology, p482-483, 2008

16.     Yinhua Lei, Wei Wang*, Huaiqiang Yu, Ting Li, Yufeng Jin and Haixia Zhang, Zhihong Li, Deep Trench Refilling With Parylene C For High-Quality Isolation In Bulk Micromachined Devices, Proceedings of 2nd Integrated Commercialization of Micro & Nanosystems International Conference &Exhibition, June 3-5, 2008, Clear Water Bay, Kowloon, HongKong Paper Number: Micro/Nano 2008-70112,

17.     Yu Zhao, Yinhua Lei, Wei Wang*, Zhihong Li, Microfluidic Patterning of Close-packed Nanoparticle Monolayer, Proceedings of the 3rd IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems January 6-9, 2008, Sanya, China

18.     Xu Ji, Wei Wang, Xia Lou, Jianhong Peng, and Zhihong Li*, A Centrifugation-Enhanced High-Efficiency Micro-Filter With Spiral Channel, The 14th International Conference on Solid- State Sensors and Actuators(Transducers’07), Lyon, Paris, PP1865-1868

19.     Dongsheng Xu, Wei Wang, Yufeng Jin and Zhihong Li*, Continuously Microfluidic Centrifugation In Sequentially Connected Semicircular Microchannels For Micrometer-Sized Particle Enrichment, the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (Micro Total Analysis Systems, uTAS’07), Paris, France, 2007, PP539-541

20.     Zhihong Li*, Spiral Microchannels For Continuously Microfluidic Centrifugation, Workshop on Microfluidics and Its Applications, Hong Kong, 2007Invited

21.     Wei Wang, and Zhihong Li*, A simplified scaling transformation for the numerical simulation of MEMS devices with thin film structures. International conference of MicroNanoChina2007, January 10-13, Sanya, China, 2007

22.     Zhanfei, Wang, Zhihong Li, Wengao Lu, "A New Self-Oscillation Loop for MEMS Vibratory Gyroscopes." IEEE ASICON 2007, pp.1046-1049

23.     Yu Wang. Haixia Zhang, Hui Guo, Guobing Zhang, Zhihong Li, “Mechanical Properties of PECVD silicon carbide thin films”, APCOT 2006, 25-28, June, Singapore

24.     Hui Guo, Yu Wang, Sheng Chen, Guobing Zhang, Haixia Zhang, Zhihong Li, “PECVD SiC as a Chemical Resistant Material in MEMS”, 1st IEEE NEMS, 18-21, Jan, 2006, Zhuhai, China,

25.     Wei Wang, Dongsheng Xu, and Zhihong Li*, Microfluidic centrifugations in a spiral microchannel, the 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences (Micro total analysis systems 2006), Tokyo, Japan, Novmber 5-9, 2006.

26.     Wei Wang, Zhihong Li*, Thermal isolation in continuous flow PCR chip, a numerical insight, Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore, June 25-28, 2006.

27.     Xu Ji, Jing Chen*, Ying Wang, Zhihong Li, Guizhen Yan, Yangyuan Wang, A Wafer Level Hermetic Package for Micromachined Structures on Glass, The 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT 2006), PAT-A0494

28.     Shasha Wang, Jing Chen*, Dachao Li, Yubo Huang, Zhihong Li, Evaluating Interface Effect On Stresses In Thin Films By A Local Curvature Metrology With High Accuracy And Resolution, The 1st Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2006), Jan. 2006, Zhuhai, China p1513-1516

29.     Zhihong Li, MEMS: An Enabling Technology for Wireless sensor Network, 2006 (Invited)

30.     Wendian Shi, Haixia Zhang*, Shasha Wang, Guobing Zhang and Zhihong Li, Modifying Residual Stress And Stress Gradient In LPCVD Si3N4 Film With Ion Implantation, Transducers’05, p824-827

31.     Zhihong Li, Norman C. Tien*, Low-Cost Electroplated Vertical Comb-Drive Actuator, Proceedings of the Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head, 2004, 220-223

32.     Bee  Lee Chua, Zhihong  Li, Daniel McCormick, W. P. Shih, Norman C. Tien*, A. S. Wexler, D. A. Niemeier and B. Holman.  A Unipolar Corona Discharge Microfabricated Ionizer Structure For Gases At Atmospheric Pressure And Composition. Proceedings of the 17th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2004, pp.261-264

33.     Wen Pin Shih, Zhihong Li, Daniel McCormick, Norman C. Tien* and C. Y. Hui.  Tunable Solenoid Microinductors Utilizing Permalloy Electro-Thermal Vibromotors.  Proceedings of the 17th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2004, pp.793-796

34.     Yi Li, Zhihong Li, Yilong Hao, Guizhen Yan, Wengang Wu* and Xiang Han, Electroless Copper Plating on Silicon Surface for MEMS, The Seventh International Conference on Solid-State and Integrated-Circuit Technology (ICSICT-2004), Beijing (October 18~21, 2004) , pp.1900-1903

35.     Daniel McCormick, Zhihong Li, Norman C. Tien*, Dielectric Fluid Immersed MEMS Tunable Capacitors, IEEE MTT-S International Microwave Symposium, 2003,  495-498

36.     Daniel McCormick, Zhihong  Li, Norman C. Tien*, Silicon Mems Tunable Capacitors Operating In Dielectric Fluid, Transducers’03, 2003,  871-874

37.     Hongrui Jiang, Zhihong Li, and Norman C. Tien*, Reducing Silicon-Substrate Parasitics Of On-Chip Transformers, The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (MEMS’02), Las Vegas, NV, USA, Jan. 2002, P649-653

38.     Ye Wang, Zhihong Li, Daniel T. McCormick and Norman C. Tien*, Low-Voltage Lateral-Contact Microrelays For Rf Applications, The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (MEMS’02), Las Vegas, NV, USA, Jan. 2002, P645-648

39.     Congshun Wang, C.Y.Xiong, Weibin Zhang, Jing Fang, Zhihong Li, Testing and simulation of novel MEMS relays by applying digital image correlation technology, The first IEEE international conference on sensors,p1204-1207,Florida,USA, June 2002.

40.     Zhihong Li, and Norman C. Tien*, A High Tuning-Ratio Silicon-Micromachined Variable Capacitor With Low Driving Voltage, Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island, SC, USA, 2002, 239-243

41.     Jing Fang, Weibin Zhang, Congshun Wang, Zhihong Li, D.C.Zhang, Electromechanical analysis of microelectromechanical structures and dynamic simulations of laterally vibratory microgyroscope, SPIE Proc. Vol.4407,p68-77,Edinburgh,UK,May 2001.

42.     Zhihong Li, Dacheng Zhang, Ting Li, Ying Wang, Guoying Wu, Novel Silicon Cap Package Technology for Monolithic Micro-inertial Measurement Unit, SPIE's 7th Annual International Symposium on Smart Structures and Materials, San Diego, CA, USA, 2000

43.     Zhihong Li Zhixiong Xiao Yilong Hao Guoying Wu and Yangyuan WangA Bulk Micromachined Vibratory Lateral Gyroscope Fabricated with Wafer Bonding and Deep Trench Etching The 10th International Conference on Solid- State Sensors and Actuators(Transducers’99), Sendai, Japan, 1999, P1594;

44.     Gang Li, Zhihong Li, Congshun Wang, Yilong Hao, Guoying Wu, Design and Simulation of Aa Novel Highly Systemmetrical Pizoelectric Triaxial Accelerometer, MSM’2000, San Diego, CA, USA, 2000, P628-631

45.     ZhiXiong Xiao, Guoying Wu, Dacheng Zhang, Yilong Hao, Zhihong, Li, “Lateral Capacity sensed Accelerometer Fabricated with the Anodic bonding and the High Aspect Ratio Etching”, The 10th International Conference on Solid- State Sensors and Actuators (Transducers’99), Sendai, Japan, 1999, P151

46.     Guoying Wu, Zhixiong Xiao, Zhihong Li, Hao Yilong, Design And Fabrication for Inertial Micro Sensors, International Conference on Solid- State and Integrated Circuit Technology (ICSICT’98), Bejing, China, 1998, P903

 

中文文章:

1.         LV ZhiqiuYANG Bo, LIU Bo, LI Zhihong, Research on Electroless Plating for Improvement of Metal Contact of Lateral RF MEMS Switch, 11届中国微米纳米技术年会

2.         基于干膜光刻胶的微流控器件快速制备技术, 季宁,汪世英,王玮,李志宏, 中国微米纳米技术学会第十一届学术年会, 2009

3.         楼夏,金星,金玉丰,李志宏,基于粘附剂键合的圆片级MEMS塑料封装技术,功能材料与器件学,Vol114No12294297, 2008

4.         杨波 李志宏,利用无电镀金实现微结构金属化技术研究,纳米技术与精密工程 Vol.5 No.314

5.         王展飞,鲁文高,李峰,李志宏MEMS振动陀螺闭环自己驱动的理论分析及数值仿真,传感技术学报,2008813371342

6.         王展飞,鲁文高,李峰,李志宏,一种频率线性可调的正交正弦波振荡器,北京大学学报:自然科学版,网络版20083http://bdxbw.chinajournal.net.cn

7.         雷银花,王 玮,王海滨,李志宏,硅对聚合酶链式反应抑制作用的实时定量实验研究,传感技术学报,第21卷,第2期,2008 pp203206 (EI)

8.         杨波,李志宏,利用无电镀金实现微结构金属化技术研究,中国微米纳米技术学会第九届学术年会,20079月,上海

9.         楼夏, 金星, 李志宏, A strategy of MEMS WLP based on Epoxy 301 bonding,中国微米纳米技术学会第九届学术年会,20079月,上海

10.     李志宏,聚合物生物MEMS加工技术(特邀报告),中国微米纳米技术学会第九届学术年会,20079月,上海

11.     陈晟,李志宏,张国炳,郭辉,王煜,田大宇,“PECVD SiC材料刻蚀技术研究,半导体学报增刊,2006

12.     王展飞,李志宏一种用于差分电容检测的电荷Delta-Sigma调制器的研究 传感技术学报,2006年第519卷,p2252~p2254 EI

13.     李志宏,聚合物生物MEMS加工技术, 中国微米纳米技术学会第九届学术年会, 20079, (特邀报告)

14.     王莎莎,陈兢,栗大超,黄玉波,李志宏,基于局部基底弯曲法的高灵敏度薄膜应力测试技术,半导体学报,v27n6p. 1129-113520066 (EI)

15.     李志宏RF MEMS 进展(特邀报告),全国力学大会,2005

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