师资力量

张锦文

张锦文,教授。1991年7月毕业于上海交通大学,获得学士学位。1991年至1996年任教于新疆大学物理系。1999年毕业于中科院新疆物理所,获得硕士学位。1999年至今在北京大学微电子学研究院工作。2005年毕业于北京大学,获得理学博士学位。2003年2月至2005年2月在香港科技大学做访问学者。主要研究方向:微纳加工技术、微型辐射传感器和微能源。主持或参加973、863、自然科学基金等项目十五项,发表文章六十余篇。联系方式:86-10-62766597;zhangjinwen@pku.edu.cn

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近年部分文章:

[1]      M.G. Li and J. Zhang, “A Betavoltaic Microcell Based on Semiconducting Single-Walled Carbon Nanotube Arrays/Si Heterojunctions”, IEEE MEMS 2015, Jan. 18-22, Estoril, Portugal, in press.

[2]      Yiyang Chang, Changchuan Chen, Peng Liu and Jinwen Zhang, “A betavoltaic microcell based on Au/s-SWCNTs/Ti Schottky junction”, Sensors & Actuators: A Physical, vol. 215, pp. 17-21, 2014.

[3]      Peng Liu, Yiyang Chang and Jinwen Zhang, “Single-walled Carbon Nanotubes Film-silicon Heterojunction Radioisotope Betavoltaic Microbatteries,” J. Micromech. Miroeng., vol. 24, No. 055026, 2014.

[4]      Fangzhou Yu and Jinwen Zhang, “Single-walled carbon nanotube Pirani gauges prepared by DEP assembly,” IEEE Transactions on Nanotechnology, vol. 12, No. 3, pp.323-329, May 2013.

[5]      Yiyang Chang, Changchuan Chen, Peng Liu and Jinwen Zhang, “A Single-Walled Carbon Nanotubes Betavoltaic Microcell”, IEEE MEMS 2013, Jan. 20-24, Taipei, Taiwan, pp.825-828.

[6]      Jinwen Zhang,Wei Jiang, Xin Wang, Jilong Zhou and Huabing Yang, “Design and fabrication of high performance wafer-level vacuum packaging based on glass–silicon–glass bonding techniques”, J. Micromech. Miroeng., vol. 22, No. 125022, Nov. 2012.

[7]      Changchuan Chen, Yiyang Chang and Jinwen Zhang, “A Novel Betavoltaic Microbattery Based on SWNTS Thin Film–Silicon Heterojunction”, IEEE MEMS 2012, Jan. 29-Feb. 2, Paris, France, pp.1197-1201.

[8]      Zhaohui Yang, Jing Wang, Jinwen Zhang, “High Performance Micro Electret Power Generator Based on Microball Bearing,” J. Micromech. Miroeng., vol. 2, No. 6: 065001, June 2011.

[9]      Jinwen Zhang, Xudong Zou and Yaping Zhang, “Improvement on the Performance of the PECVD SiO2/ Si3N4 Double-Layer Electrets,” IEEE Transactions on Dielectrics and Electrical Insulation, vol. 18, No. 2, pp. 456-462, April 2011.

[10]  Wei Jiang, Xin Wang and Jinwen Zhang, “A Single Crystal Silicon Micro Pirani Vacuum Gauge with High Aspect Ratio Structure,” Sensors and Actuators: A Physical, vol. 163, pp.159-163, 2010.